Flange for MPCVD cavity connection and MPCVD device

The invention relates to a flange for MPCVD cavity connection and an MPCVD device. The flange comprises an upper flange, a lower flange, a shielding strip and a sealing ring; the upper flange is matched with the lower flange and is used for fixing the MPCVD cavity; the lower flange is provided with...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	WEI HAOYIN, ZENG FANCHU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CYLINDERS DIFFUSION TREATMENT OF METALLIC MATERIAL ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY PISTONS SEALINGS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	The invention relates to a flange for MPCVD cavity connection and an MPCVD device. The flange comprises an upper flange, a lower flange, a shielding strip and a sealing ring; the upper flange is matched with the lower flange and is used for fixing the MPCVD cavity; the lower flange is provided with an annular open groove I, the width of the open groove I is integer multiples of the half-wavelength of the microwave transmitted in a medium by taking the partition plate as the medium, and the open groove I is used for mounting the partition plate; a second open groove and a third open groove are formed in the groove bottom of the first open groove in the lower flange; the second open groove and the third open groove are concentric annular grooves, and the radius of the second open groove is smaller than that of the third open groove. The second slot is used for installing a shielding strip, and the third slot is used for installing a sealing ring. The MPCVD device comprises a flange, an upper half cavity, a lowe