Semiconductor equipment convenient to transport

According to the technical scheme, the semiconductor equipment convenient to transport is characterized in that the semiconductor equipment comprises a machine body, a sputtering chamber is fixedly connected to the middle of the upper end of the machine body, a protection box is clamped to the upper...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CHEN SHILANG, LIU DENGYU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	According to the technical scheme, the semiconductor equipment convenient to transport is characterized in that the semiconductor equipment comprises a machine body, a sputtering chamber is fixedly connected to the middle of the upper end of the machine body, a protection box is clamped to the upper end of the machine body, insertion columns are fixedly connected to chamfers of the lower end of the protection box, the protection box is arranged on the outer side of the sputtering chamber, and the insertion columns are fixedly connected to the outer side of the sputtering chamber. A protection assembly is fixedly connected to the inner side of the protection box, inserting grooves are formed in the two sides of the upper end of the machine body, connecting assemblies are arranged on the outer sides of the inserting grooves, and a fixing assembly is arranged on the lower side of the machine body. And therefore, a guide rod connected with a driven gear is driven to rotate, a guide plate is driven to move up and