Automatic equipment

The utility model provides automation equipment which comprises a process cavity, a process power supply cabinet, a vacuum unit, a system cabinet, a power distribution cabinet, an operation cabinet and a bridge. Wherein the system cabinet and the process power supply cabinet are respectively arrange...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	PENG ZHONGYE, YANG SHIFENG, LI RITIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model provides automation equipment which comprises a process cavity, a process power supply cabinet, a vacuum unit, a system cabinet, a power distribution cabinet, an operation cabinet and a bridge. Wherein the system cabinet and the process power supply cabinet are respectively arranged on the left and right sides of the vacuum unit, the operation cabinet and the process power supply cabinet are arranged on the same side of the vacuum unit, and the process cavity and the power distribution cabinet are arranged on the front and rear sides of the vacuum unit. And the process cavity, the process power supply cabinet, the vacuum unit, the system cabinet, the power distribution cabinet and the operation cabinet are connected through wire pipes to work. And finally, a bridge frame is arranged around the vacuum unit, and the bridge frame is used for bearing the wire pipe. According to the automatic equipment, all parts of the system are reasonably planned, all pipelines are reasonably arranged and stor