Vapor deposition furnace
The utility model relates to the field of deposition furnaces, in particular to a vapor deposition furnace which comprises a box body, a baffle, two sliding grooves, an extraction pipe, a heater and a control groove, the baffle is connected to the box body in a sliding mode, the sliding grooves are...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model relates to the field of deposition furnaces, in particular to a vapor deposition furnace which comprises a box body, a baffle, two sliding grooves, an extraction pipe, a heater and a control groove, the baffle is connected to the box body in a sliding mode, the sliding grooves are fixedly connected to the box body, the two sliding grooves are formed in the two ends of the box body respectively, the extraction pipe is arranged on the box body, and the heater is arranged on the extraction pipe. A vacuum pump is connected to the extraction pipe, a heater is arranged on the box body, a control groove is formed in the box body, supporting plates and clamping blocks are further included, the supporting plates are connected to the sliding grooves in a sliding mode, the clamping blocks are connected to the two ends of each supporting plate in a sliding mode, tension springs are connected to the two clamping blocks in a sleeving mode, the two supporting plates are connected to the two sliding grooves |
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