System for recovering hexachlorodisilane and hexachlorodisiloxane in polycrystalline silicon production

The utility model discloses a system for recovering hexachlorodisilane and hexachlorodisiloxane in polycrystalline silicon production, and belongs to the technical field of waste liquid treatment and recovery in polycrystalline silicon production. Comprising a collection storage tank, a first settli...

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Bibliographische Detailangaben
Hauptverfasser: SONG LEI, MING YONG, XIANG CHUNLIN, TU DAYONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a system for recovering hexachlorodisilane and hexachlorodisiloxane in polycrystalline silicon production, and belongs to the technical field of waste liquid treatment and recovery in polycrystalline silicon production. Comprising a collection storage tank, a first settling tank, a first rectifying tower, a second settling tank and a second rectifying tower, the second rectifying tower comprises a tower body, the tower body internally comprises a common stripping section, a partition wall section and a common rectifying section, a partition wall plate which is vertically distributed is arranged in the partition wall section, the tower body on one side of the partition wall plate forms a pre-separation tower, and the tower body on the other side of the partition wall plate, the common rectifying section and the common stripping section form a main separation tower; a feeding hole of the second rectifying tower is formed in the pre-separating tower; the top of the main separation tow