Spraying coating film system structure of 3D (three-dimensional) composite board

The utility model discloses a 3D (three-dimensional) composite board spray coating film system structure which comprises a first target material layer group and a second target material layer, and the first target material layer group is provided with a plurality of first target material layers; the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHU ZESONG, GE XIUBIN, JIN LIE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a 3D (three-dimensional) composite board spray coating film system structure which comprises a first target material layer group and a second target material layer, and the first target material layer group is provided with a plurality of first target material layers; the first target material layer is configured to be an Nb target material layer; the second target material layer is configured to be a Sn target material layer or an In target material layer. According to the film system structure disclosed by the utility model, the original target material Ti is removed, and the phenomenon that the target material Ti reacts with oxygen to generate TiO2 which is not resistant to high temperature is avoided, so that the phenomenon that the TiO2 which is not resistant to high temperature is melted to cause high-pressure heterochromatic defects can be avoided, and the product quality and the yield are improved. 本实用新型公开了一种3D复合板材喷涂镀膜膜系结构,包括第一靶材层组以及第二靶材层,所述第一靶材层组具有多层第一靶材层;所述第一靶材层被配置为Nb靶材层;