Sealing ring and chemical mechanical polishing device comprising same

The utility model provides a sealing ring and a chemical mechanical polishing device comprising the same. The sealing ring is in a circular ring shape; the sealing ring sequentially comprises a first flat part, a first convex part and a second flat part from the outer ring to the inner ring; the first convex part is an inverted U-shaped bulge, and the lower part of the inverted U-shaped bulge is hollow; a first groove is formed in the convex side, close to the first convex part, of the first flat part; the second flat part is connected with the end part of the first convex part through an arc groove; the sealing ring is provided with seven movable sealing rings, it can be guaranteed that the internal air pressure state of the grinding head is isolated from the outside in the chemical mechanical polishing process, and therefore the effect of precise grinding and polishing is achieved, the chemical mechanical polishing precision is improved through the chemical mechanical polishing device comprising the sealing