Vertical semiconductor wafer TTV interference testing device

The utility model relates to the technical field of wafer detection in the semiconductor industry, and discloses a vertical semiconductor wafer TTV interference testing device which is composed of a laser beam expanding and collimating unit, an interference imaging unit, an interference measuring unit and a whole machine debugging unit. During measurement, the actual working state of the wafer can be restored, so that the parameters of the wafer in the actual working state can be tested, the test result is more accurate, the precision is higher, and the cost is lower. 本申请涉及半导体行业的晶圆检测技术领域，公开了一种立式半导体晶圆TTV干涉测试装置，所述装置由激光扩束准直单元、干涉成像单元、干涉测量单元以及整机调试单元构成。本申请在测量时，能够还原晶圆实际工作状态，因此能够测试晶圆实际工作状态下的参数，测试结果更加准确，精度更高，并且成本也更低。