Line source evaporation crucible
The utility model discloses a linear source evaporation crucible which comprises a body and an upper cover. The body is provided with a containing cavity, the containing cavity is used for containing an evaporation material, an opening is formed in the top of the containing cavity, and the center of...
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| creator | LIN ZHIBIN LIN SHAOQIN |
| description | The utility model discloses a linear source evaporation crucible which comprises a body and an upper cover. The body is provided with a containing cavity, the containing cavity is used for containing an evaporation material, an opening is formed in the top of the containing cavity, and the center of the hollow-square-shaped body is a hollow area; the upper cover is arranged at the top opening of the containing cavity, the upper cover is provided with a plurality of nozzles, the nozzles surround the hollow area, and inner cavities of the nozzles are communicated with the containing cavity through the opening. According to the technical scheme, the rectangular-ambulatory-plane body is arranged, on one hand, the heating uniformity of an evaporation material in the containing cavity is improved, the uniformity of the evaporation rate is guaranteed, and the uniformity of the thickness of a film layer is improved; on the other hand, the capacity of the containing cavity is increased, the frequency of adding evapora |
| format | Patent |
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The body is provided with a containing cavity, the containing cavity is used for containing an evaporation material, an opening is formed in the top of the containing cavity, and the center of the hollow-square-shaped body is a hollow area; the upper cover is arranged at the top opening of the containing cavity, the upper cover is provided with a plurality of nozzles, the nozzles surround the hollow area, and inner cavities of the nozzles are communicated with the containing cavity through the opening. According to the technical scheme, the rectangular-ambulatory-plane body is arranged, on one hand, the heating uniformity of an evaporation material in the containing cavity is improved, the uniformity of the evaporation rate is guaranteed, and the uniformity of the thickness of a film layer is improved; on the other hand, the capacity of the containing cavity is increased, the frequency of adding evapora</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211203&DB=EPODOC&CC=CN&NR=214991804U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211203&DB=EPODOC&CC=CN&NR=214991804U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LIN ZHIBIN</creatorcontrib><creatorcontrib>LIN SHAOQIN</creatorcontrib><title>Line source evaporation crucible</title><description>The utility model discloses a linear source evaporation crucible which comprises a body and an upper cover. The body is provided with a containing cavity, the containing cavity is used for containing an evaporation material, an opening is formed in the top of the containing cavity, and the center of the hollow-square-shaped body is a hollow area; the upper cover is arranged at the top opening of the containing cavity, the upper cover is provided with a plurality of nozzles, the nozzles surround the hollow area, and inner cavities of the nozzles are communicated with the containing cavity through the opening. According to the technical scheme, the rectangular-ambulatory-plane body is arranged, on one hand, the heating uniformity of an evaporation material in the containing cavity is improved, the uniformity of the evaporation rate is guaranteed, and the uniformity of the thickness of a film layer is improved; on the other hand, the capacity of the containing cavity is increased, the frequency of adding evapora</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFDwycxLVSjOLy1KTlVILUssyC9KLMnMz1NILipNzkzKSeVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfHOfkaGJpaWhhYGJqGhxkQpAgC4HyZR</recordid><startdate>20211203</startdate><enddate>20211203</enddate><creator>LIN ZHIBIN</creator><creator>LIN SHAOQIN</creator><scope>EVB</scope></search><sort><creationdate>20211203</creationdate><title>Line source evaporation crucible</title><author>LIN ZHIBIN ; LIN SHAOQIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN214991804UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2021</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>LIN ZHIBIN</creatorcontrib><creatorcontrib>LIN SHAOQIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LIN ZHIBIN</au><au>LIN SHAOQIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Line source evaporation crucible</title><date>2021-12-03</date><risdate>2021</risdate><abstract>The utility model discloses a linear source evaporation crucible which comprises a body and an upper cover. The body is provided with a containing cavity, the containing cavity is used for containing an evaporation material, an opening is formed in the top of the containing cavity, and the center of the hollow-square-shaped body is a hollow area; the upper cover is arranged at the top opening of the containing cavity, the upper cover is provided with a plurality of nozzles, the nozzles surround the hollow area, and inner cavities of the nozzles are communicated with the containing cavity through the opening. According to the technical scheme, the rectangular-ambulatory-plane body is arranged, on one hand, the heating uniformity of an evaporation material in the containing cavity is improved, the uniformity of the evaporation rate is guaranteed, and the uniformity of the thickness of a film layer is improved; on the other hand, the capacity of the containing cavity is increased, the frequency of adding evapora</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Line source evaporation crucible |
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