Line source evaporation crucible
The utility model discloses a linear source evaporation crucible which comprises a body and an upper cover. The body is provided with a containing cavity, the containing cavity is used for containing an evaporation material, an opening is formed in the top of the containing cavity, and the center of...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a linear source evaporation crucible which comprises a body and an upper cover. The body is provided with a containing cavity, the containing cavity is used for containing an evaporation material, an opening is formed in the top of the containing cavity, and the center of the hollow-square-shaped body is a hollow area; the upper cover is arranged at the top opening of the containing cavity, the upper cover is provided with a plurality of nozzles, the nozzles surround the hollow area, and inner cavities of the nozzles are communicated with the containing cavity through the opening. According to the technical scheme, the rectangular-ambulatory-plane body is arranged, on one hand, the heating uniformity of an evaporation material in the containing cavity is improved, the uniformity of the evaporation rate is guaranteed, and the uniformity of the thickness of a film layer is improved; on the other hand, the capacity of the containing cavity is increased, the frequency of adding evapora |
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