Vertical wafer loading and unloading manipulator

The utility model belongs to the field of wafer processing equipment, and particularly relates to a feeding and discharging manipulator for vertically-placed wafers. According to the structure, an X-axis module installation base and a guide rail installation block are installed on a rack in parallel, and a sliding block of an X-axis linear module and a guide rail sliding block are connected with the two ends of a Y-axis module installation base respectively; a Y-axis linear module is installed on the Y-axis module installation seat, a ball screw spline is fixed on a sliding block of the module, the wafer grabbing assembly is arranged at the bottom end of the ball screw spline and comprises an upper clamping plate and a lower clamping plate which are installed in the vertical direction, and when the upper clamping plate and the lower clamping plate move relatively, a grabbing positioning guide wheel can clamp or loosen the outer edge of a clamped wafer. According to the utility model, the wafer vertically plac