Metal Hall detector for magnetic measurement of Tokamak device
The utility model provides a metal Hall detector for magnetic measurement of a Tokamak device, which relates to the technical field of magnetic field measurement with the spatial dimension in micron dimension, and comprises a substrate, and the surface layer of the substrate is provided with a coppe...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a metal Hall detector for magnetic measurement of a Tokamak device, which relates to the technical field of magnetic field measurement with the spatial dimension in micron dimension, and comprises a substrate, and the surface layer of the substrate is provided with a copper lead layer and a metal sensitive layer; the copper lead layer and the substrate are both provided with a plurality of copper lead through holes, the metal sensitive layer is formed by depositing metal on the substrate, and the metal sensitive layer is connected with the copper lead layer and used for measuring a magnetic field. By the adoption of the scheme, accumulative errors caused by the fact that an integrator is used in traditional magnetic measurement on a fusion experiment research device can be avoided, nano-scale deposition thickness and millimeter-scale size are achieved, the problem of low spatial resolution caused by large size is greatly solved, and the precision and reliability of magnetic field me |
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