MEMS vibration sensor

The utility model relates to an MEMS vibration sensor. The MEMS vibration sensor uses a proof mass having an electrically isolated metal structure embedded therein. In one implementation, a proof mass is suspended from an anchor (extending from a substrate) by a resilient structure. In another implementation, the proof mass is suspended from the edge of the recess (in the base) by a resilient structure. The embedded metal structure provides additional mass without any increase in the size of the proof mass. The metal structure may be, for example, unused and not (electrically) connected to any other through silicon vias (TSVs). 本实用新型涉及一种MEMS振动传感器。所述MEMS振动传感器使用具有嵌入其中的电气隔离的金属结构的检验质量块。在一个实现方式中，检验质量块通过弹性结构从(从基底延伸的)锚悬挂。在另一实现方式中，检验质量块由弹性结构从(基底中的)凹部的边缘悬挂。嵌入的金属结构提供了额外的质量，而没有检验质量块的尺寸的任何增加。金属结构可以是例如未被使用且未被(电)连接到任何其它的硅通孔(TSV)。