Three-axis air bearing table support capable of protecting air bearings

The utility model discloses a three-shaft air bearing table support capable of protecting an air bearing. The three-shaft air bearing table support comprises the air bearing, a bearing seat, a stand column, a first reinforcing plate, a second reinforcing plate, a third reinforcing plate, a protectiv...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FAN ZHIMING, LUO ZHOUHUAI, ZHANG HONG, ZHONG SHENGJUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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