Three-axis air bearing table support capable of protecting air bearings

The utility model discloses a three-shaft air bearing table support capable of protecting an air bearing. The three-shaft air bearing table support comprises the air bearing, a bearing seat, a stand column, a first reinforcing plate, a second reinforcing plate, a third reinforcing plate, a protectiv...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FAN ZHIMING, LUO ZHOUHUAI, ZHANG HONG, ZHONG SHENGJUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses a three-shaft air bearing table support capable of protecting an air bearing. The three-shaft air bearing table support comprises the air bearing, a bearing seat, a stand column, a first reinforcing plate, a second reinforcing plate, a third reinforcing plate, a protective sleeve and a base plate. The lower end of the stand column is vertically and fixedly connected with the base plate, and external threads are arranged on the outer wall. The air bearing comprises a bearing inner ring and a bearing outer ring, the bearing outer ring is fixed to the upper end of the stand column through a bearing seat, and the bearing inner ring is fixedly connected with the center of the lower end face of the three-axis air bearing table. The first to third reinforcing plates are used for reinforcing the upright post and the substrate; the protective sleeve is a hollow cylinder with an open upper end and a closed lower end, and a threaded through hole matched with the external thread on the outer w