Ultraviolet irradiation device

The utility model provides an ultraviolet irradiation device carrying an excimer lamp, which can improve startability. The ultraviolet irradiation device is provided with a plurality of excimer lamps, and each excimer lamp is provided with a light-emitting tube in which a discharge gas including a rare gas is sealed. The plurality of excimer lamps include a first excimer lamp in which the discharge gas is sealed at a first sealing gas pressure and a second excimer lamp in which the discharge gas is sealed at a second sealing gas pressure lower than the first sealing gas pressure. The first excimer lamp is disposed at a position at which at least a portion of the emitted light from the second excimer lamp can be incident. 本实用新型提供一种提高起动性的搭载有准分子灯的紫外线照射装置。紫外线照射装置具备多个准分子灯，该多个准分子灯具有封入有包含稀有气体的放电用气体的发光管。多个准分子灯包含以第一封入气体压力封入有放电用气体的第一准分子灯和以低于第一封入气体压力的第二封入气体压力封入有放电用气体的第二准分子灯。第一准分子灯被配置于来自第二准分子灯的出射光的至少一部分能够入射的位置。