Annealing furnace special for titanium dioxide target material

The utility model discloses an annealing furnace special for a titanium dioxide target material. The annealing furnace comprises a furnace body, a cabinet door is hinged to the front end of the furnace body through a hinge, a locking mechanism is arranged between the cabinet door and the furnace bod...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CUI NA, FENG ZHIHAO, KANG MINGSHENG, WANG JIANGANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses an annealing furnace special for a titanium dioxide target material. The annealing furnace comprises a furnace body, a cabinet door is hinged to the front end of the furnace body through a hinge, a locking mechanism is arranged between the cabinet door and the furnace body, a heating wire is wound on the side wall of the furnace body, and a heater is arranged on the outer wall of the furnace body. A plurality of layers of material racks are arranged in the furnace body; air pipes are arranged at the top end and the bottom end of the furnace body, and a plurality of air blowing openings are formed in the air pipes; a vacuum pump is arranged above the furnace body; the outer wall of the furnace body is wrapped with a heat preservation layer. A temperature sensor is arranged in the furnace body, a PLC is arranged on the outer wall of the furnace body, the output end of the temperature sensor is connected with the input end of the PLC, and the output end of the PLC is connected with th