Probe card adjusting device
The utility model discloses a probe card adjusting device, which can realize automatic adjustment of a probe card in multiple directions without holding the probe card by a detector, is convenient and fast to adjust and operate, can improve the detection efficiency and the detection accuracy, and co...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a probe card adjusting device, which can realize automatic adjustment of a probe card in multiple directions without holding the probe card by a detector, is convenient and fast to adjust and operate, can improve the detection efficiency and the detection accuracy, and comprises a base, a probe card adjusting mechanism, a film adjusting mechanism and a microscope, the probe card adjusting mechanism comprises a probe card placing groove used for placing a probe card and a probe card driving mechanism used for driving the probe card placing groove to move in the X direction, the Z direction and the transverse rotation, and the film adjusting mechanism comprises a film fixing piece used for fixing a film and a film driving mechanism used for driving the film fixing piece to move in the X direction, the Y direction and the longitudinal rotation. The film fixing piece is located above the probe card placing groove, the microscope is located above the film fixing piece, and a lens of the |
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