Cleaning wafer rack suitable for silicon wafers with non-standard sizes
The utility model relates to a cleaning wafer rack suitable for silicon wafers with non-standard sizes, and belongs to the technical field of semiconductor cleaning. Comprising a wafer rack body, the wafer rack body is arranged in a standard wafer rack of the automatic cleaning machine, the wafer ra...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a cleaning wafer rack suitable for silicon wafers with non-standard sizes, and belongs to the technical field of semiconductor cleaning. Comprising a wafer rack body, the wafer rack body is arranged in a standard wafer rack of the automatic cleaning machine, the wafer rack body is matched with an inner cavity of the standard wafer rack, the surface of the wafer rack body is provided with an object placing unit used for placing non-standard silicon wafers, and the object placing unit is vertically through. Each storage unit comprises a plurality of clamping grooves which are evenly arranged at intervals, the distance between every two adjacent clamping grooves is matched with a storage groove in a standard wafer frame, and the size of each clamping groove is matched with that of a non-standard silicon wafer. The number of the storage units is multiple, and the multiple storage units are arranged side by side. And the rack body is a piece made of a Teflon material. The wafer rack is |
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