Capacitor structure and semiconductor device

The utility model discloses a capacitor structure and a semiconductor device. The capacitor structure comprises a lower electrode, a capacitor dielectric structure, a first non-metal nitride layer and an upper electrode, wherein the capacitor dielectric structure, the first non-metal nitride layer a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ZHONG DINGBANG, CHEN MINTENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator ZHONG DINGBANG
CHEN MINTENG
description The utility model discloses a capacitor structure and a semiconductor device. The capacitor structure comprises a lower electrode, a capacitor dielectric structure, a first non-metal nitride layer and an upper electrode, wherein the capacitor dielectric structure, the first non-metal nitride layer and the upper electrode are sequentially formed on the lower electrode. By arranging the first non-metal nitride layer with a higher work function between the upper electrode and the capacitor dielectric structure, diffusion of current in the upper electrode to the capacitor dielectric structure can be effectively reduced, leakage current under positive bias or negative bias is inhibited, breakdown of the capacitor dielectric structure is avoided, and the performance of the device can be effectively improved. 本实用新型公开了一种电容结构以及半导体器件,该电容结构包括下电极,依次形成在下电极上的电容介电结构、第一非金属氮化物层和上电极。通过在上电极和电容介电结构之间设置具有较高功函数的第一非金属氮化物层,能够有效减少上电极中的电流向电容介电结构中扩散,抑制了正偏置或负偏置下的漏电流,避免了电容介电结构被击穿,从而能够有效提高器件性能。
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN214411243UU</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN214411243UU</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN214411243UU3</originalsourceid><addsrcrecordid>eNrjZNBxTixITM4syS9SKC4pKk0uKS1KVUjMS1EoTs3NTM7PSwEKAeVSUssyk1N5GFjTEnOKU3mhNDeDkptriLOHbmpBfnxqMdCg1LzUknhnPyNDExNDQyMT49BQY6IUAQAfnyr8</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Capacitor structure and semiconductor device</title><source>esp@cenet</source><creator>ZHONG DINGBANG ; CHEN MINTENG</creator><creatorcontrib>ZHONG DINGBANG ; CHEN MINTENG</creatorcontrib><description>The utility model discloses a capacitor structure and a semiconductor device. The capacitor structure comprises a lower electrode, a capacitor dielectric structure, a first non-metal nitride layer and an upper electrode, wherein the capacitor dielectric structure, the first non-metal nitride layer and the upper electrode are sequentially formed on the lower electrode. By arranging the first non-metal nitride layer with a higher work function between the upper electrode and the capacitor dielectric structure, diffusion of current in the upper electrode to the capacitor dielectric structure can be effectively reduced, leakage current under positive bias or negative bias is inhibited, breakdown of the capacitor dielectric structure is avoided, and the performance of the device can be effectively improved. 本实用新型公开了一种电容结构以及半导体器件,该电容结构包括下电极,依次形成在下电极上的电容介电结构、第一非金属氮化物层和上电极。通过在上电极和电容介电结构之间设置具有较高功函数的第一非金属氮化物层,能够有效减少上电极中的电流向电容介电结构中扩散,抑制了正偏置或负偏置下的漏电流,避免了电容介电结构被击穿,从而能够有效提高器件性能。</description><language>chi ; eng</language><subject>ELECTRICITY</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211015&amp;DB=EPODOC&amp;CC=CN&amp;NR=214411243U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211015&amp;DB=EPODOC&amp;CC=CN&amp;NR=214411243U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZHONG DINGBANG</creatorcontrib><creatorcontrib>CHEN MINTENG</creatorcontrib><title>Capacitor structure and semiconductor device</title><description>The utility model discloses a capacitor structure and a semiconductor device. The capacitor structure comprises a lower electrode, a capacitor dielectric structure, a first non-metal nitride layer and an upper electrode, wherein the capacitor dielectric structure, the first non-metal nitride layer and the upper electrode are sequentially formed on the lower electrode. By arranging the first non-metal nitride layer with a higher work function between the upper electrode and the capacitor dielectric structure, diffusion of current in the upper electrode to the capacitor dielectric structure can be effectively reduced, leakage current under positive bias or negative bias is inhibited, breakdown of the capacitor dielectric structure is avoided, and the performance of the device can be effectively improved. 本实用新型公开了一种电容结构以及半导体器件,该电容结构包括下电极,依次形成在下电极上的电容介电结构、第一非金属氮化物层和上电极。通过在上电极和电容介电结构之间设置具有较高功函数的第一非金属氮化物层,能够有效减少上电极中的电流向电容介电结构中扩散,抑制了正偏置或负偏置下的漏电流,避免了电容介电结构被击穿,从而能够有效提高器件性能。</description><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNBxTixITM4syS9SKC4pKk0uKS1KVUjMS1EoTs3NTM7PSwEKAeVSUssyk1N5GFjTEnOKU3mhNDeDkptriLOHbmpBfnxqMdCg1LzUknhnPyNDExNDQyMT49BQY6IUAQAfnyr8</recordid><startdate>20211015</startdate><enddate>20211015</enddate><creator>ZHONG DINGBANG</creator><creator>CHEN MINTENG</creator><scope>EVB</scope></search><sort><creationdate>20211015</creationdate><title>Capacitor structure and semiconductor device</title><author>ZHONG DINGBANG ; CHEN MINTENG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN214411243UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2021</creationdate><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>ZHONG DINGBANG</creatorcontrib><creatorcontrib>CHEN MINTENG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZHONG DINGBANG</au><au>CHEN MINTENG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Capacitor structure and semiconductor device</title><date>2021-10-15</date><risdate>2021</risdate><abstract>The utility model discloses a capacitor structure and a semiconductor device. The capacitor structure comprises a lower electrode, a capacitor dielectric structure, a first non-metal nitride layer and an upper electrode, wherein the capacitor dielectric structure, the first non-metal nitride layer and the upper electrode are sequentially formed on the lower electrode. By arranging the first non-metal nitride layer with a higher work function between the upper electrode and the capacitor dielectric structure, diffusion of current in the upper electrode to the capacitor dielectric structure can be effectively reduced, leakage current under positive bias or negative bias is inhibited, breakdown of the capacitor dielectric structure is avoided, and the performance of the device can be effectively improved. 本实用新型公开了一种电容结构以及半导体器件,该电容结构包括下电极,依次形成在下电极上的电容介电结构、第一非金属氮化物层和上电极。通过在上电极和电容介电结构之间设置具有较高功函数的第一非金属氮化物层,能够有效减少上电极中的电流向电容介电结构中扩散,抑制了正偏置或负偏置下的漏电流,避免了电容介电结构被击穿,从而能够有效提高器件性能。</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language chi ; eng
recordid cdi_epo_espacenet_CN214411243UU
source esp@cenet
subjects ELECTRICITY
title Capacitor structure and semiconductor device
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-19T20%3A58%3A58IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=ZHONG%20DINGBANG&rft.date=2021-10-15&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN214411243UU%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true