Crystal doping device

A crystal doping device comprises a cover cap, a containing cup and a buffering piece, the crystal doping device is arranged above a crucible, a containing space is formed in the cover cap, and the cover cap is provided with an opening facing the crucible; the containing cup is arranged in the conta...

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Hauptverfasser: ZHU YANXUN, SHI YINGRU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A crystal doping device comprises a cover cap, a containing cup and a buffering piece, the crystal doping device is arranged above a crucible, a containing space is formed in the cover cap, and the cover cap is provided with an opening facing the crucible; the containing cup is arranged in the containing space and used for containing a dopant, and the bottom of the containing cup is conical and provided with an open hole; the buffering piece is arranged in the containing space and located below the containing cup, the buffering piece is provided with a bearing face and a discharging portion, the bearing face is obliquely arranged and located under the open hole, and the discharging portion is connected to the bearing face and lower than the bearing face. Therefore, doping efficiency is improved, and melt splashing of dopants is avoided. 一种晶体掺杂装置包括一罩盖、一容杯及一缓冲件,所述晶体掺杂装置是设置于一坩埚上方,所述罩盖内部具有一容置空间,且具有朝向所述坩埚方向的一开口;所述容杯设置于所述容置空间中,且用以容置一掺杂物,所述容杯底部呈锥形并具有一开孔;所述缓冲件设置于所述容置空间中且位于所述容杯下方,所述缓冲件具有一承接面及一出料部,所述承接面呈倾斜设置且位于所述开孔的正下方