Optimized substrate holder assembly for vertically holding semiconductor wafers

The utility model provides a substrate holder assembly used for vertically holding a semiconductor wafer, which comprises a horseshoe-shaped sheet part, the horseshoe-shaped sheet part is provided with a circular shape on one side and an opening on the other side, the sheet part is provided with a retreating part, a first end and an opposite second end, and the first end and the second end are opposite to each other. The utility model relates to a semiconductor wafer holder comprising a recess having a recess depth dr and a recess height hr, extending around the inside to form a curved surface and a flat surface, characterized in that both ends comprise holder pins placed on the flat surface adapted to hold a semiconductor wafer. 本实用新型提供一种用于竖直地保持半导体晶圆的基板夹持器组件，包括马蹄形片部，该马蹄形片部具有在一侧上的圆形形状和在另一侧上的开口，该片部具有回退部、第一端和相反的第二端，该回退部具有回退部深度dr和回退部高度hr、围绕着内侧延伸形成弯曲表面和平坦表面，其特征在于，两端包括放置在平坦表面上的适于保持半导体晶圆的保持器销。