Substrate processing apparatus
The utility model relates to a substrate processing device. More substrate storage containers than in the prior art are stored in a storage unit in which a substrate processing container in which a substrate is stored is temporarily standby. A substrate processing apparatus for processing a substrat...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model relates to a substrate processing device. More substrate storage containers than in the prior art are stored in a storage unit in which a substrate processing container in which a substrate is stored is temporarily standby. A substrate processing apparatus for processing a substrate is provided with: a substrate storage container placement unit on which a substrate storage container for storing a substrate to be processed is placed; and a storage area that is disposed close to the substrate storage container placement unit and that stores the substrate storage containers, the storage area having storage units on which a plurality of substrate storage containers are placed and stored in the horizontal direction, the storage area having a plurality of vertical layers, and the storage unit located at the uppermost part being capable of transferring the substrate storage containers between the storage unit and the top traveling vehicle, and the storage unit located at the uppermost part being ca |
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