Storage device of wafer carrier
The utility model relates to a storage device of a wafer carrier. The storage device provided by the embodiment of the utility model comprises a supporting plate, wherein the supporting plate comprises a first end part, a main body part and a second end part which are continuously arranged along a f...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a storage device of a wafer carrier. The storage device provided by the embodiment of the utility model comprises a supporting plate, wherein the supporting plate comprises a first end part, a main body part and a second end part which are continuously arranged along a first direction; the cushion block is fixed to the lower side of the first end so that the supporting plate can be obliquely arranged as a whole, and the first end is higher than the second end; the stop block is fixed on the upper side of the second end part; the two limiting plates are fixed to the upper side of the main body part and arranged at intervals in the second direction, and the second direction is perpendicular to the first direction; the transmission assemblies are arranged between the two limiting plates and arranged at intervals in the second direction, each transmission assembly comprises a plurality of idler wheels arranged in the first direction, each idler wheel is rotatably connected to the main |
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