Preparation device of doped titanium dioxide film with adjustable components
The utility model discloses a preparation device of a doped titanium dioxide film with adjustable components, which comprises a plurality of gas cylinders, a vacuum tube furnace and a vacuum pump, theplurality of gas cylinders are connected with the vacuum tube furnace through pipelines, and the vac...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a preparation device of a doped titanium dioxide film with adjustable components, which comprises a plurality of gas cylinders, a vacuum tube furnace and a vacuum pump, theplurality of gas cylinders are connected with the vacuum tube furnace through pipelines, and the vacuum pump is communicated with an inner cavity of the vacuum tube furnace through a pipeline. The method comprises the following steps: 1, intercepting a titanium wire with a set length or a titanium sheet with a set area; 2, a vacuum coating machine is adopted for film preparation; step 3, placingthe sample plated with the titanium film in the step 2 in a vacuum tube furnace; and 4, controlling the total air pressure in the furnace after ventilation. The preparation method has the beneficial effects that the method for preparing the doped titanium dioxide film is simple, the components and the structure of the film are convenient and flexible to regulate and control, and the prepared filmis high in surface quality |
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