Silicon wafer bearing and transferring structure

The utility model provides a silicon wafer bearing and transferring structure. The silicon wafer bearing and transferring structure comprises a water tank and a silicon wafer clip, the water tank is of a groove structure with an opening in the top, and a first drainage block and a second drainage bl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DU CHENPENG, ZHAO XIAOGUANG, YIN QING, GENG MINGQIANG, JIN LIHUI, YANG HUA
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model provides a silicon wafer bearing and transferring structure. The silicon wafer bearing and transferring structure comprises a water tank and a silicon wafer clip, the water tank is of a groove structure with an opening in the top, and a first drainage block and a second drainage block are arranged on the two sides. A groove is formed in the top of the first drainage block; a clipbracket for placing a silicon wafer clip is arranged between the first drainage block and the second drainage block; wherein the silicon wafer clip is used for bearing a silicon wafer and feeding thesilicon wafer into the wafer inserting machine for wafer inserting; the silicon wafer clip is also provided with a manipulator lifting point for feeding; a centering mechanism used for being in buttjoint with a lifting fork is arranged on a bottom plate of the water tank. And a centering base is correspondingly arranged on the lifting pallet fork. According to the silicon wafer bearing and transferring structure, the wate