Wafer loading and unloading machine

The utility model discloses a wafer loading and unloading machine, which can be used for placing wafer boxes with different sizes and detecting the wafer storage state in the wafer boxes, and comprises a machine table with an additional circuit board, and a positioning mechanism arranged on the mach...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG JIAXIU, ZHU YUMIN, ZHONG ZHUOJUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a wafer loading and unloading machine, which can be used for placing wafer boxes with different sizes and detecting the wafer storage state in the wafer boxes, and comprises a machine table with an additional circuit board, and a positioning mechanism arranged on the machine table and used for positioning the wafer boxes placed on the additional circuit board, the positioning mechanism is provided with a positioning unit, a buckling unit and a limiting unit to provide positioning for wafer boxes of different sizes, so that the wafer loading and unloading machine canbe suitable for multiple types of wafer boxes and is good in applicability, the sensing mechanism is arranged on the additional circuit board, and the detection mechanism is arranged on the machine table. The detection mechanism is provided with the first detection group and the second detection group, and the first detection group or the second detection group is selected to detect the storage state of the wafer accordi