Deep ultraviolet double-beam laser system
The utility model discloses a deep ultraviolet double-beam laser system, and relates to the technical field of laser systems. The device comprises a laser, a frequency-doubled crystal, a frequency-tripled crystal, a wavelength separation mirror, a resonant cavity, a beam combiner and a frequency-qui...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a deep ultraviolet double-beam laser system, and relates to the technical field of laser systems. The device comprises a laser, a frequency-doubled crystal, a frequency-tripled crystal, a wavelength separation mirror, a resonant cavity, a beam combiner and a frequency-quintuple crystal. Wherein the laser emits 1064nm laser to form a first optical path, the first opticalpath is sequentially provided with a frequency-doubled crystal, a frequency-tripled crystal, a wavelength separation mirror and a resonant cavity, the wavelength separation mirror separates out a path of 532nm laser to form a second optical path, and the resonant cavity returns to a path of 355nm laser to form a third optical path; and the beam combining sheet is arranged at the intersection of the second light path and the third light path, a path of composite light containing 355 nm laser and 532 nm laser is synthesized to form a fourth light path, and the quintuple frequency crystal is arranged on the fourth light |
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