Deep ultraviolet double-beam laser system

The utility model discloses a deep ultraviolet double-beam laser system, and relates to the technical field of laser systems. The device comprises a laser, a frequency-doubled crystal, a frequency-tripled crystal, a wavelength separation mirror, a resonant cavity, a beam combiner and a frequency-qui...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ZHANG PENGFEI, CHEN TAO, SHANG FANJIE, LIN JIE, PAN DENGGAO, YANG JINGSHU, XU KANGWEI, TANG SHAOFU
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model discloses a deep ultraviolet double-beam laser system, and relates to the technical field of laser systems. The device comprises a laser, a frequency-doubled crystal, a frequency-tripled crystal, a wavelength separation mirror, a resonant cavity, a beam combiner and a frequency-quintuple crystal. Wherein the laser emits 1064nm laser to form a first optical path, the first opticalpath is sequentially provided with a frequency-doubled crystal, a frequency-tripled crystal, a wavelength separation mirror and a resonant cavity, the wavelength separation mirror separates out a path of 532nm laser to form a second optical path, and the resonant cavity returns to a path of 355nm laser to form a third optical path; and the beam combining sheet is arranged at the intersection of the second light path and the third light path, a path of composite light containing 355 nm laser and 532 nm laser is synthesized to form a fourth light path, and the quintuple frequency crystal is arranged on the fourth light