Vacuum linear motion mechanism

The utility model relates to the technical field of linear motion mechanisms, in particular to a vacuum linear motion mechanism which comprises a shell, a linear motor is installed in the shell, a connecting rod is installed on an output shaft of the linear motor, a push rod is fixedly connected to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: XU ZHIWEI, HU RONGCHAO, GE SONGYU
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of linear motion mechanisms, in particular to a vacuum linear motion mechanism which comprises a shell, a linear motor is installed in the shell, a connecting rod is installed on an output shaft of the linear motor, a push rod is fixedly connected to one end of the connecting rod, a flange plate is arranged on the shell, and a connecting sleeve is connected to one end of the shell. The push rod is slidably installed in the connecting sleeve, a corrugated pipe is arranged at one end of the connecting sleeve, a connecting disc is arranged at one end of the corrugated pipe, a connecting plate is arranged at one end of the connecting disc, the connecting plate is connected with the connecting disc through a first elastic piece, a ball is embedded in one end of the push rod, and the other part of the ball is embedded in the connecting plate. An acting plate is arranged at the end, away from the connecting disc, of the connecting plate, and apressure sensor is clampe