Piezoelectric transducer and fluid ejection device

Embodiments of the present disclosure relate to a piezoelectric transducer and a fluid ejection device. The piezoelectric transducer includes a semiconductor body having a bottom electrode of an electrically conductive material. The piezoelectric element is on the bottom electrode. The bottom electr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DAVIDE ASSANELLI, IRENE MARTINI, CERLA MARIA LAZZARI, PAOLO FERRARINI, LORENZO VINCIGUERRA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Embodiments of the present disclosure relate to a piezoelectric transducer and a fluid ejection device. The piezoelectric transducer includes a semiconductor body having a bottom electrode of an electrically conductive material. The piezoelectric element is on the bottom electrode. The bottom electrode and the first protective layer on the piezoelectric element have a first opening through which aportion of the piezoelectric element is exposed and a second opening through which a portion of the bottom electrode is exposed. Conductive layers on the first protective layer and within the first and second openings are patterned to form a top electrode in electrical contact with the piezoelectric element at the first opening, a first bias strip in electrical contact with the top electrode, anda second bias strip in electrical contact with the bottom electrode at the second opening. Through the disclosed embodiments, damage to the integrity of the top electrode can be advantageously avoided, and it can be avoided t