Drying device

The utility model provides a drying device. The drying device comprises a cover body, a base and a supporting frame assembly. The cover body and the base jointly define a closed cavity capable of containing a base plate. The supporting frame assembly is arranged in the closed cavity and comprises a supporting frame and a plurality of supporting pieces located on the supporting frame, the top endsof the supporting pieces are used for supporting the base plate, and at least part of the supporting pieces can move relative to the supporting frame. The drying device provided by the utility model can reduce or avoid various trace phenomena caused by non-uniform brightness of the substrate in a decompression drying process while realizing the support of the substrates with different layout forms. 本实用新型提供一种干燥装置。干燥装置包括罩体、底座和支撑架组件，罩体用于和底座共同围合成可收容基板的密闭腔体。支撑架组件设置在密闭腔体内，支撑架组件包括支撑架和位于支撑架上的多个支撑件，支撑件的顶端用于支撑基板，至少部分支撑件可相对于支撑架移动。本实用新型的干燥装置在实现对具有不同布局形式的基板支撑的同时，能够减少或者避免减压干燥工艺中基板由于亮度不均匀而产生的各种痕迹现象。