A graphite pedestal structure for epitaxial growth

The utility model relates to the technical field of epitaxial growth. The utility model relates to a graphite base, in particular to a graphite base structure for epitaxial growth. In the prior art, an epitaxial wafer is inconvenient to take and place; the work efficiency is low. A movable seat is arranged on the graphite base; after the growth of the epitaxial wafer is finished, the whole movableseat can be taken down; the device is simple in structure, convenient and fast, a plurality of movable seats are arranged, the linings are placed in the movable seats in advance, the movable seats onthe graphite base are taken down after the epitaxial wafers grow, the movable seats where the linings are placed are directly placed on the graphite base, the cycle is repeated, the working efficiency is further improved, and the operation is simple, convenient and fast. 本实用新型涉及外延生长技术领域，具体涉及一种用于外延生长的石墨基座结构，解决了现有技术中取放外延片不方便，造成工作效率低的问题，在石墨基座上设置活动座，待外延片生长完成后可以将整个活动座取下，方便、快捷，而且配备多个活动座，在活动座内提前放置好衬片，待外延片生长完成后将石墨基座上的活动座取下，在将已经放置