Radio frequency power supply control device for plasma processor
The utility model provides a radio frequency power supply control device for a plasma processor. The radio frequency power supply control device comprises a box body, a bottom plate and a panel, wherein the box body is rectangular and consists of a bottom plate, a panel, a top cover frame and a top...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a radio frequency power supply control device for a plasma processor. The radio frequency power supply control device comprises a box body, a bottom plate and a panel, wherein the box body is rectangular and consists of a bottom plate, a panel, a top cover frame and a top cover; wherein the bottom plate is L-shaped; the panel is rectangular and is fixed to the top end face of the front end of the bottom plate through screws. The bottom plate and the panel are fixed through screws to form a U shape; the top cover frame is in a saddle shape, and the bottom plate and the panel are arranged on the inner side of the bottom of the top cover frame in a sleeving mode in a clearance fit mode. The top end, the left end and the right end of the bottom plate are fixedly connected with the top cover frame through screws. The electronic equipment box has the advantages that the structure is reasonable, dust in the box body is convenient to clean, electronic equipment in the box body is convenient |
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