Automatic dust removing and feeding device of target sputtering coating equipment

The utility model provides an automatic dedusting and feeding device of target sputtering coating equipment, which belongs to the technical field of dedusting and feeding, and comprises a fixed seat,a placing groove is formed in the outer wall of the top of the fixed seat, and a transparent dustproo...

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Bibliographische Detailangaben
Hauptverfasser:	XIANG QINGBO, MI XIANWEN, YANG HAICHENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model provides an automatic dedusting and feeding device of target sputtering coating equipment, which belongs to the technical field of dedusting and feeding, and comprises a fixed seat,a placing groove is formed in the outer wall of the top of the fixed seat, and a transparent dustproof cover is fixed on the outer wall of the circumference of the top, close to the placing groove, ofthe fixed seat through a sealing strip. A connecting piece is welded to the circumferential outer wall of the top of the transparent dustproof cover, limiting holes are formed in the outer wall of the top of the connecting piece, clamping grooves are formed in the outer walls of the tops, close to the two sides of the transparent dustproof cover, of the fixing base, a sealing cover is hinged to the outer wall of one side of the top of the fixing base through hinge hinges, and clamping strips are welded to the outer walls of the two sides of the bottom of the sealing cover. An adsorption holeis formed in the outer wall