Graphite boat capable of avoiding EL pollution of silicon wafers

The utility model discloses a graphite boat capable of avoiding EL pollution of silicon wafers, which comprises a graphite boat body, a plurality of graphite boat pieces arranged at equal intervals are arranged on the graphite boat body, and at least three clamping point connecting pieces which are...

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Bibliographische Detailangaben
Hauptverfasser:	TONG RUI, ZHANG ZHONGWEI, KE XIMAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model discloses a graphite boat capable of avoiding EL pollution of silicon wafers, which comprises a graphite boat body, a plurality of graphite boat pieces arranged at equal intervals are arranged on the graphite boat body, and at least three clamping point connecting pieces which are not completely arranged in a collinear manner are arranged at the edges of the graphite boat pieces;the clamping point connecting piece comprises a connecting plate located in the middle and baffles located on the two sides. Wherein a groove structure is formed by a gap between the connecting plateand the baffle plate, the thickness of the connecting plate is greater than that of the graphite boat sheet, a silicon wafer is clamped above the graphite boat sheet through a groove in the same side, and the gap between the silicon wafer and the graphite boat sheet is 1-2 mm. According to the utility model, by increasing the thickness of the connecting plate in the middle of the clamping point connecting piece arranged i