Substrate processing apparatus

The utility model relates to a substrate processing device. Provided is a technique capable of achieving high productivity and increasing the degree of freedom in setting a conveyance path of a substrate. The present utility model is provided with: a container placement unit on which a storage container for storing a plurality of substrates is placed; a plurality of substrate processing units thatrespectively process the substrates; a first substrate conveying mechanism, the substrate holder includes a movable base, a first substrate holding portion, and a second substrate holding portion. The first substrate holding section and the second substrate holding section are provided so as to be independently movable back and forth on the base. A first substrate holding part and a second substrate holding part which move forward together to transfer the substrate to and from the storage container so that the edges of the substrate in the left-right direction are open and support the positions of the substrate in th