Measuring system

The present application discloses a measurement system configured to be integrated with a processing device for optically measuring a structure, the measurement system comprising: a support assembly for holding a structure to be measured in a measurement plane, moving the structure along at least one first transverse axis, and for changing a z-axis position of the measurement plane by means of a z-axis stage; wherein the z-axis objective table comprises two wedge blocks which are symmetrical relatively, the wedge blocks support a middle element, and the middle element is provided with a directional lower surface which is in contact with the wedge blocks; wherein the support assembly is configured to change a z-axis position of the measurement plane by changing a distance between the wedges. 本申请公开了一种测量系统，配置为与处理设备集成，处理设备用于对结构进行光学测量，测量系统包括：支撑组件，用于将待测结构保持在测量平面中，使结构沿着至少一个第一横轴移动，并且用于通过z轴载物台改变测量平面的z轴位置；其中，z轴载物台包括两个相对对称的楔块，楔块支撑中间元件，中间元件具有与楔块接触的定向下表面；其中，支撑组件配置为通过改变楔块之间的距离来改变测量平面的z轴位置。