Magnetron sputtering target with detection device

The utility model discloses a magnetron sputtering target with a detection device. The device comprises a vacuum cavity, a target material, a target seat, a connecting seat and a water-cooling back plate, a target seat is mounted in the center of the bottom of the vacuum cavity; connecting bases are fixed to the two inner side walls of the bottom of the vacuum cavity correspondingly. One end of the connecting seat is in contact with the outer wall of the target seat; a mounting structure is arranged on the outer wall of the target seat below the connecting seat; a target material is installedat the top end in the target base, a water-cooling back plate is installed in the target base below the target material, circulation pipe grooves are formed in the two sides of the bottom end of the water-cooling back plate, the bottom ends of the circulation pipe grooves extend out of the target base, plugs are installed in the centers of the bottom ends of the circulation pipe grooves, and an alarm is installed in the c