Electrostatic adsorption system capable of automatically adjusting adsorption force
The utility model relates to an electrostatic adsorption system capable of automatically adjusting adsorption force. The electrostatic adsorption system comprises an adsorption manipulator and a controller, the adsorption manipulator comprises a rigid support body, a flexible circuit board and a cop...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to an electrostatic adsorption system capable of automatically adjusting adsorption force. The electrostatic adsorption system comprises an adsorption manipulator and a controller, the adsorption manipulator comprises a rigid support body, a flexible circuit board and a copper foil electrode embedded in the flexible circuit board, and the flexible circuit board is fixedlyarranged on the rigid support body; a detection sensor is embedded in the flexible circuit board and/or the rigid support body, and the detection sensor is a single or composite sensor used for detecting pressure borne by the flexible circuit board and temperature and/or humidity signals of the flexible circuit board; the controller is electrically connected with the detection sensor and adjuststhe adsorption force of the adsorption manipulator according to signals such as pressure, temperature and/or humidity transmitted by the detection sensor; parameters such as temperature, pressure andhumidity can be directly co |
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