Novel movable germanium single crystal furnace leak detection device

The utility model discloses a novel movable germanium single crystal furnace leak detection device. The device comprises a moving mechanism, a detection mechanism and an alarm lamp, the size of an inner ring of the annular detection holder is matched with the diameter of a furnace body of the single...

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1. Verfasser: LYU YUANFANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a novel movable germanium single crystal furnace leak detection device. The device comprises a moving mechanism, a detection mechanism and an alarm lamp, the size of an inner ring of the annular detection holder is matched with the diameter of a furnace body of the single crystal furnace; the gear at the power output end of the motor rotates to drive the whole electricdrive active displacement piece to move up and down in the direction of the limiting rod. Moving from the top of the single crystal furnace to the bottom of the furnace; carrying out annular scanningtype detection on the whole single crystal furnace; annular arrangement of silicon sensitive sheets, the movement track of the silicon sensitive sheet forms a cylindrical detection surface; omnibearing detection of silicon leakage steam is realized. The silicon sensitive sheet is electrically connected with the alarm lamp; when the silicon sensitive sheet senses leaked silicon steam, the alarm system of the silicon sensiti