Split type easily-tuned microwave resonant cavity suitable for PCVD process

The utility model discloses a split type easily tuned microwave resonant cavity suitable for a PCVD technology, comprising a cavity body with an opening and a cavity cover which is detachably buckledon the opening of the cavity body and is used for forming a closed cavity between the cavity body and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WU HAIHUA, LIAN HAIZHOU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE WAVEGUIDES
Online-Zugang:	Volltext bestellen
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