Split type easily-tuned microwave resonant cavity suitable for PCVD process

The utility model discloses a split type easily tuned microwave resonant cavity suitable for a PCVD technology, comprising a cavity body with an opening and a cavity cover which is detachably buckledon the opening of the cavity body and is used for forming a closed cavity between the cavity body and the cavity cover, and the side wall of the cavity body is provided with a waveguide inlet which isused for enabling microwaves to enter the closed cavity in a coupling manner; a first coaxial ring which extends along the axial direction and is used for inserting one end of the glass base tube isarranged on the inner wall of the cavity; a second coaxial ring which extends along the axial direction and is used for inserting the other end of the glass base tube is arranged on the inner wall ofthe cavity cover; and the tail end surface of the first coaxial ring and the tail end surface of the second coaxial ring are opposite to each other, and a radiation slit through which resonance microwaves pass is reserved betwee