Silicon wafer transmission line

The utility model discloses a silicon wafer transmission line, which comprises a silicon wafer turntable, a silicon wafer carrying device and a silicon wafer transmission table, the silicon wafer turntable comprises a turntable and a plurality of clamping platforms, the clamping platforms are unifor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LUO YINBING, GONG YANGANG, ZHU ZHIQIANG, ZHANG JIANWEI, DAI JUN, ZHANG XUEQIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The utility model discloses a silicon wafer transmission line, which comprises a silicon wafer turntable, a silicon wafer carrying device and a silicon wafer transmission table, the silicon wafer turntable comprises a turntable and a plurality of clamping platforms, the clamping platforms are uniformly distributed at the periphery of the turntable, and the turntable drives the clamping platforms to rotate; the silicon wafer carrying device comprises an adsorption conveying platform. One end of the adsorption transmission platform is arranged above the clamping platform on one side of the turntable; the other end of the adsorption transmission platform is arranged above the silicon wafer transmission platform; wherein the adsorption transmission platform comprises a belt transmission line and a suction hole, the suction hole sucks air to suck the silicon wafer from the clamping platform, the silicon wafer is adsorbed on the belt transmission line, the silicon wafer is transmitted to theupper part of the silico