A multi-zone gasket for substrate support assembly

A gasket for a substrate support assembly may have: a top surface having a surface area; and a plurality of regions that together define the surface region of the top surface. The plurality of regionsmay include at least: a) a first region including a first gasket layer stack, the first region havin...

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Bibliographische Detailangaben

1. Verfasser:	VIJAY D.PARKHE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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