A multi-zone gasket for substrate support assembly

A gasket for a substrate support assembly may have: a top surface having a surface area; and a plurality of regions that together define the surface region of the top surface. The plurality of regionsmay include at least: a) a first region including a first gasket layer stack, the first region having a first average thermal conductivity in a first direction, and b) a second region including one or more gasket layers, the second region having a second average thermal conductivity in the first direction. 一种用于基板支撑组件的垫圈可以具有：顶表面，所述顶表面具有表面区域；和多个区，所述多个区一起限定所述顶表面的所述表面区域。所述多个区可以包括至少：a)第一区，所述第一区包括第一垫圈层堆叠，所述第一区具有在第一方向上的第一平均热导率，和b)第二区，所述第二区包括一个或多个垫圈层，所述第二区具有在所述第一方向上的第二平均热导率。