Tool coating cavity

The utility model discloses a tool coating cavity which is characterized by comprising a coating cavity, a bottom frame, a window interface, a small arc source interface, a main drawing opening, an on-door rotary multi-arc interface and a cavity door, wherein a coating cavity is formed in the underf...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CHU JINGYU, WANG HUIFENG, QIAN PENGLIANG, YANG YUANCAI, XIONG KAI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model discloses a tool coating cavity which is characterized by comprising a coating cavity, a bottom frame, a window interface, a small arc source interface, a main drawing opening, an on-door rotary multi-arc interface and a cavity door, wherein a coating cavity is formed in the underframe; a plurality of small arc source interfaces are formed in the front surface of the coating cavity; a plurality of rows of small arc source interfaces are arranged; columns of the small arc source interfaces are arranged in a delta shape; a window interface is arranged between the small arc source interfaces; a plurality of main drawing openings are formed in one side of the coating cavity; a cavity door is arranged on the reverse side of the coating cavity; a plurality of on-door rotary multi-arc interfaces are arranged below the cavity door; a plurality of window interfaces are also formed in the cavity door; the utility model has the technical effects that the structure of the coatingcavity is changed; the t