Composite tray for dry etching of LED patterned sapphire substrate

The utility model discloses a composite tray for dry etching of an LED patterned sapphire substrate. The tray comprises an upper tray piece and a lower tray piece which are bonded with each other, theupper tray piece and the lower tray piece are sealed and have no air-permeable gap, a wafer placing hole is formed in the upper tray piece, and a group of air suction holes are uniformly distributedin the area, corresponding to the wafer placing hole, of the lower tray piece. The lower tray piece is made of silicon carbide ceramic materials with good heat dissipation performance, and the upper tray piece is made of aluminum oxide ceramic materials. The wafer fixing device is simple in structure and can well fix the wafer. Meanwhile, the heat dissipation performance is good, the wafer edge effect is little, the wafer etching quality is high, and the method can be widely applied to the field of LED substrate manufacturing. 本实用新型公开了一种用于干法刻蚀LED图形化蓝宝石衬底的复合托盘，包括相互黏连的托盘上片和托盘下片，所述托盘上片和托盘下片间密闭无透气间隙，在托盘上片上开设有晶片放置孔，所述托盘下片对应