Wafer transmission sealing protection device for electron beam scanning measuring instrument

The utility model relates to a wafer transmission sealing protection device used for an electron beam scanning measuring instrument, comprising a control console used for realizing automatic sealing film taking and an SMIF transmission box, the control console is arranged on the surface of a bearing table in an electron beam scanner, and the SMIF transmission box is arranged on the control console; the utility model has a simple structure, convenient use, low cost, according to the utility model, a whole SMIF mechanism does not need to be externally hung; according to the utility model, the wafer can be automatically conveyed only by using the original conveying mechanism of the electron beam scanning measuring instrument, the wafer conveying device has the advantages of convenient installation, small size and low failure rate, the adaptability of the wafer conveying device is good, and the automatic parameter measurement of the 8-inch wafer supported by the electron beam scanning measuring instrument for the