Vertical surface emitting type laser structure
The utility model provides a vertical surface emitting type laser structure. The utility model discloses a vertical surface emitting type laser structure. And the non-oxidized region of the oxide layer, the P-type ohmic contact layer and the groove structure are concentrically arranged in the direct...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a vertical surface emitting type laser structure. The utility model discloses a vertical surface emitting type laser structure. And the non-oxidized region of the oxide layer, the P-type ohmic contact layer and the groove structure are concentrically arranged in the direction perpendicular to the substrate, the width of the groove structure is greater than the width of the non-oxidized region, and the width of the non-oxidized region is greater than the width of the P-type ohmic contact layer. The size of the P-type ohmic contact layer defines a gain limiting size, and the size of an unoxidized region of the oxide layer defines an optical limiting size, so that a high-power single-mode laser structure in which gain limiting and optical limiting are separately andindependently controlled is realized.
本实用新型提供了一种垂直面射型的激光结构,该垂直面射型的激光结构中,将所述氧化层的未氧化区域、所述P型欧姆接触层和所述凹槽结构,在垂直于所述衬底的方向上,同心设置,并且,所述凹槽结构的宽度大于所述未氧化区域的宽度,所述未氧化区域的宽度大于所述P型欧姆接触层的宽度。该P型欧姆接触层的尺寸定义了增益限制尺寸,氧化层的未氧化区域的尺寸定义了光学限制尺寸,进而实现了将增益限制和 |
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