Clamp for monocrystalline silicon wafer defect detection and heating equipment

The embodiment of the utility model provides a clamp for monocrystalline silicon wafer defect detection and heating equipment. The clamp for monocrystalline silicon wafer defect detection comprises aclamp body, wherein the at least two accommodating parts are arranged on the clamp body, detection samples borne by the at least two accommodating parts are respectively taken from different monocrystalline silicon wafers, and the at least two accommodating parts are symmetrical about the center of the clamp body; and the heat insulation parts are used for preventing heat conduction between different detection samples and are arranged between the adjacent accommodating parts. According to the clamp disclosed by the embodiment of the utility model, a plurality of detection samples taken from different monocrystalline silicon wafers can be simultaneously heated, so that the heat treatment time can be saved, and the defect analysis efficiency can be improved. Moreover, the large-size monocrystalline silicon wafer is